Platinum Electrodes and Structured Substrates for Electronic

Platinum Electrodes and Structured Substrates for Electronic

Platinum Electrodes and Structured Substrates for Electronic thin films are widely used botton electrode for Si-based electronic devices because of its high thermal conductivity & good stability in oxidizing atmospheres. The Pt wafers have thermal stability, which guarantees excellent performance of electronic devices including MEMS.

Platinized Si Wafers

  • Pt film thickness : 50 nm ~ 300 nm
  • Adhesion layer : Ti, 10 nm ~ 20 nm
  • Substrates : SiO2 /Si wafers, SiO2 /SOI wafers
  • Size : Sample size ~ 6 inches
  • Orientation : (111)
  • FWHM : ~ 2° (depends on substrate)
  • Temperature endurance : ~ 800°C
  • Roughness (Rms) : ~ 1.5 nm

Metal Coating Services

  • Pt, Au, AL, Ti, Mo, Ta, Cr, Cu, Ni, NiCr etc.
  • Substrate & Film thickness : As per customer requirements

Structured Substrates for piezo-MEMS Devices

  • Pt/Ti/SOI Wafer
  • Pt/Ti/LTO/Si3N4 /(SiO2)/Si Wafer
  • Others
Products ( 6 inch Standard)Quantity
1. Platinized Si wafer (6 inch, Standard) – Orientation of Pt: (111)

 – Thickness of Pt: 150 nm

– Adhesion layer: Ti, 10~20 nm

* Substrate: SiO2/Si

– SiO2: (dry) thermal oxide, 300 nm

– Si: 6 inch, p-type, Prime, SSP, <100>

* Film structure: Pt/Ti/SiO2/Si

2. Platinized Si wafer (4 inch)1
3. Pt coating (user wafer)1
4. 4 inch Pt coating (user wafer)1
5. Top Pt electrode (150 nm)1

Futher Inquiry Email us at or call us at +91 22 4970 0739

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Our Advantages For The Most Part …… Platinum Electrodes and Structured Substrates for Electronic

All India Metal Corporation is Platinum Electrodes as well as Structured Substrates for Electronics Manufacturer in India & offers in particular in relation to a high quality of Platinum Electrodes & Structured Substrates for Electronics in various grades. All India Metal Corporation is, all the more  further looking for more stockholders in Middle East, & Europe, Africa, & Far East Asia as well as Latin America to sell our Platinum Electrodes & Structured Substrates for Electronics. Certainly email us at to become all the more our authorized dealer & distributor of Platinum Electrodes & Structured Substrates for Electronics in your country. We are in the meantime a reliable as well as undoubtedly & subsequently best supplier of Platinum Electrodes & Structured Substrates for Electronics worldwide.

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